Investigation on Electrical and Optical Properties of Hydrogen Doped Boron Carbide Thin Films
Sources:nanopure | Release date:
2018-07-28
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Key words:Investigation on Electrical and Optical Properties of Hydrogen Doped Boron Carbide Thin Films
As complementary metal oxide semiconductor (CMOS) devices shrink to
smaller size, the resistance-capacitance (RC) delay in
metal interconnects remains critical bottleneck for
improving performance. Search for new low-k dielectric materials to
reduce
the dielectric capacitance has been a priority for a
long time. Boron carbide (B4C) has attracted interest as a
material for low-k dielectric applications owing to its unique
properties. In this work, thin
films of boron carbide are deposited by RF
magnetron sputtering in presence of hydrogen gas. Metal-insulator-metal
structure
using aluminum and boron carbide are formed.
Herein, we investigate the dielectric properties (frequency dependent
dielectric
constant), electrical properties (resistivity) and
optical properties (transmission) of hydrogen doped boron carbide thin
films. Further, the effect of deposition parameters
on properties of hydrogen doped boron carbide films is reviewed.
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